Profilometer

Brand:KLA
Model:P-7
Fixed asset number:S250000234
Affiliated Core:Microfabrication Core
Location:419 - Clean Room,Building A, Gaoke Innovation Center 
Equipment Manager:Zhou Xiaohu,Zhang Wendie
Contact:0755-2684 9243,zhangwendie@szbl.ac.cn

1. 150mm diameter circular stage
2. Automatic control of X and Y axes by motors, manual rotation and leveling
3. Single scan length of 150mm, no stitching
4. Field of view not less than 1.7mm * 1.4mm, CCD with no less than 5M pixels
5. Maximum Z - direction movement range of the probe: 327um
6. Vertical resolution up to 0.01Å
7. Step measurement repeatability reaches 4Å
8. Z - direction linearity: ± 0.5% > 2000Å, 10 Å ≤2000Å
9. Probe pressure range: 0.5 - 50mg
10. Lateral resolution: 0.025um
11. Arc correction: Can eliminate errors caused by the arc movement of the probe
12. Software: A simple and easy - to - use software interface
13. Probe specifications: 45°, 60°  2um
14. Measurement technology: Usually, the surface scanning probe is moved, and the height information of the surface is obtained by measuring the position change of the probe.

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