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Leadership Administration
Biomedical Research Core Facilities
Mass Spectrometry Core Bio-Imaging Core Biochemistry Core Genomics Core HPC Core Microfabrication Core
Laboratory Animal Center
Center Office Animal Husbandry Management Core Laboratory Technology Support Core Laboratory Animal Welfare and Quality Control Core Facility Operation and Maintenance Core
Biomedical Research Core Facilities Laboratory Animal Center
Center Overview Mass Spectrometry Core Bio-Imaging Core Biochemistry Core Genomics Core HPC Core Microfabrication Core
Center Overview Center Office Animal Husbandry Management Core Laboratory Technology Support Core Laboratory Animal Welfare and Quality Control Core Facility Operation and Maintenance Core
Leadership Administration Biomedical Research Core Facilities Laboratory Animal Center
Mass Spectrometry Core Bio-Imaging Core Biochemistry Core Genomics Core HPC Core Microfabrication Core
Center Office Animal Husbandry Management Core Laboratory Technology Support Core Laboratory Animal Welfare and Quality Control Core Facility Operation and Maintenance Core

Equipment

Core Facility
Biomedical Research Core Facilities
Mass Spectrometry Core Genomics Core HPC Core Microfabrication Core Biochemistry Core Bio-Imaging Core
Laboratory Animal Center
Biomedical Research Core Facilities Laboratory Animal Center
Mass Spectrometry Core Genomics Core HPC Core Microfabrication Core Biochemistry Core Bio-Imaging Core

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Equipment

Equipment Core Facility Biomedical Research Core Facilities Microfabrication Core Photolithography (Mask aligner)
Photolithography (Mask aligner)

Brand：SUSS
Model：MA/BA6 Gen4
Fixed asset number：S240001067
Affiliated Core: Microfabrication Core
Location：419 - Clean Room，Building A, Gaoke Innovation Center 
Equipment Manager：Zhou Xiaohu，Zhang Wendie
Contact：0755-2684 9243，zhangwendie@szbl.ac.cn

Instrument Time Booking Sample Delivery Appointment
Function and Application Technical Parameters

1. Chuck sizes: 6 inches, 4 inches, 3 inches, 2 inches
2. Exposure modes: four modes including vacuum contact, hard contact, soft contact, and proximity exposure
3. Light intensity: 365nm, 64.36mW/cm2; 405nm, 153.3mW/cm2, and the light intensity uniformity is better than ±2.5%

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